Torsional Vibration and Sensitivity Analysis of Microcantilever in Liquid
Keywords:Microcantilever, Torsional Oscillation, Sensitivity Analysis, Liquid
Development of microsystems and ever-increasing advances of nanotechnology have resulted in growing applications of microcantilevers (MCs), including Atomic Force Microscopy (AFM). In AFM, transverse vibration of microfiber from a liquid medium results in resonance of unwanted hydrodynamic and electrostatic forces, which can be minimized by torsional mode. In the present study, the differential equation of the vibrational motion is extracted by acquiring the hydrodynamic force applied to MCs aiming to investigate the torsional vibration behavior of MCs in a liquid medium; and the extracted equation is solved to study the behavior of MCs in a liquid medium. Considering the significant effect of MC geometry on its torsional vibrations in a liquid medium, Sobol's variance-based sensitivity analysis method was utilized to investigate the effectiveness of MC geometry on torsional vibration. The sensitivity analysis results show that length and width have the most significant effects on the quality factor and the resonance frequency of MCs.
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